Digital Demodulation of Interferometric Signals
نویسنده
چکیده
The marriage of optical sensing techniques with sophisticated digital signal processing has resulted in a myriad of practical metrology systems. Optical metrology systems offer many attractive measurement features. These systems are inherently non-contacting, nondestructive, and immune from electromagnetic interference. In addition, since light is used as the sensing probe, the measurement system is capable of high sensitivity, fine resolution (both spatial and temporal), and absolute calibration.
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